Универсальные платформы
This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.
Характеристики
Производитель
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THK PRECISION CO., LTD
Универсальные платформы
This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.
Features
Features
- An actuator capable of both rough feeding and fine feeding
- Generates less heat itself
- High static stability achieved with friction retention
- High positional repeatability with a built-in liner encoder
Application
- High-accuracy positioning of an optical system
- Laser alignment
- Precision mapping measurement
- X-ray/analysis and measuring equipment
- Specimen stage for microscopes
- Application in which the object is to be held static after position adjustment
The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.
Lineup
TS1L80 / TS1L120
X-axis stage
TS2L180
XY-axes stage with an opening
TS1R150
Rotary stage
Controller for Ultrasonic motor stage
Sample software
We provide sample software for RS232C connection for free.
If the sample software is used, the controller can perform basic motions such as return to origin, travel to a designated position and current value display immediately after it is connected with the computer.
TS1L80 / TS1L120
X-axis stage
| Model number | TS1L80-015A | TS1L80-015B | TS1L120-035A | TS1L120-035B |
|---|---|---|---|---|
| Moving range | ±7.5mm | ±17.5mm | ||
| Resolution | 20nm | 40nm | 20nm | 40nm |
| Maximum travel speed | 10mm/sec | 10mm/sec | ||
| Withstand load | 2kg | 3kg | ||
| Built-in optical linear scale Type | Manufactured by RENISHAW | Manufactured by THK PRECISION | Manufactured by RENISHAW | Manufactured by THK PRECISION |
| Size | 80×100×28 | 80×118×28 | 120×140×28 | 120×158×28 |
TS2L180
XY-axes stage with an opening
| Model number | TS2L180-015A | TS2L180-015B |
|---|---|---|
| Moving range | (X)±7.5mm, (Y)±7.5mm | |
| Resolution | 20nm | 40nm |
| Maximum travel speed | 10mm/sec | |
| Withstand load | 3kg | |
| Built-in optical linear scale Type | Manufactured by RENISHAW | Manufactured by THK PRECISION |
| Size | 180×205×48 | 180×220×48 |
TS1R150
Rotary stage
| Model number | TS1R150-360A |
|---|---|
| Moving range | 360° |
| Resolution | 1" |
| Maximum travel speed | 5°/sec |
| Withstand load | 3kg |
| Built encoder | Rotary encoder |
| Size | 150×170×46 |
Controller for Ultrasonic motor stage
- This product is a controller that is dedicated for the ultrasonic motor stage, and contains a driver and a linear scale input circuit.
- It is capable of controlling three axes at a maximum.
- Equipped with an RS232C as the control interface, the controller can be operated as soon as it is connected with the computer.
| Model number | TC1311A | TC1322A | TC1333A | TC1312A | |
|---|---|---|---|---|---|
| Number of controlled axes | 1 | 2 | 3 | 1 | |
| Stage to be connected | Linear 1 axis | Linear 2 axis | Linear 3 axis | Rotary 1 axis | |
| Input sensor type | Linear scale/Rotary encoder reading | ||||
| Control interface | RS232C | ||||
| Control system | PID feedback control (for fine feeding) | ||||
| Driver output voltage | －12V ～ +12V | ||||
| Power source | AC100 ～ 120V / AC200 ～ 240V Switchable | ||||
Sample software
We provide sample software for RS232C connection for free.
If the sample software is used, the controller can perform basic motions such as return to origin, travel to a designated position and current value display immediately after it is connected with the computer.