Стандартные линейные платформы
Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.
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Характеристики
Производитель
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THK PRECISION CO., LTD
Стандартные линейные платформы
Classification of performances with two mechanisms
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
Direct-drive mechanism
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
Direct-drive mechanism
- A mechanism in which a piezo-electric elements directly moves the table.
- It excels in resolution and response thanks to a short stroke.
- With high rigidity, it is capable of performing stable positioning even under a large load.
Displacement magnification mechanism
- The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
- A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
- Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
Applications
- Semiconductor and FPD inspection
- HDD Tester
- Laser optic alignment
- Interferometer devices
- Analytical Instruments
- Nanometer positioning
Lineup
PS1H / PS1L
Standard linear X-axis stage
PS2H / PS2L
Standard linear XY-axes stage
PSVH / PSVL
Standard linear Z-axis stage
PS3H / PS3L
Standard linear XYZ-axes stage
PS1H / PS1L
Standard linear X-axis stage
PS1H Direct-drive mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS1H25-006U | 6 | 1 | ±1 | 13000 | 5 | 25×30×16 |
| PS1H35-006U | 6 | 1 | ±1 | 9700 | 10 | 35×35×16 |
| PS1H45-012U | 12 | 1 | ±1 | 6200 | 10 | 45×45×16 |
| PS1H60F-012U | 12 | 1 | ±1 | 4100 | 50 | 60×60×20 |
| PS1H40F-020U | 20 | 1 | ±1 | 4100 | 30 | 48×60×13.5 |
| PS1H60-020U | 20 | 1 | ±1 | 3300 | 10 | 60×60×16 |
| PS1H80-030U | 30 | 1 | ±1 | 1900 | 10 | 80×80×16 |
| PS1H80F-030U | 30 | 1 | ±1 | 1900 | 50 | 80×80×20 |
PS1L Displacement magnification mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS1L45-030U | 30 | 1 | ±1 | 1500 | 10 | 45×50×20 |
| PS1L40-050U | 50 | 2 | ±2 | 970 | 5 | 40×45×15 |
| PS1L60-060U | 60 | 2 | ±2 | 1300 | 10 | 60×70×20 |
| PS1L40-100U | 100 | 2 | ±2 | 510 | 5 | 40×45×15 |
| PS1L65-250U | 250 | 10 | ±10 | 360 | 5 | 65×65×15 |
| PS1L66-500U | 500 | 20 | ±20 | 200 | 5 | 66×66×17 |
| PS1L80-700U | 700 | 30 | ±30 | 106 | 5 | 80×80×20 |
PS2H / PS2L
Standard linear XY-axes stage
PS2H Direct-drive mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS2H60-012U | （X,Y）12 | （X,Y）1 | （X,Y）±1 | 2000 | 10 | 60×80×25 |
| PS2H95-012U | （X,Y）12 | （X,Y）1 | （X,Y）±1 | 3800 |
10 |
95×95×25 |
| PS2H60-030U | （X,Y）30 | （X,Y）1 | （X,Y）±1 | 1600 |
10 |
60×80×25 |
| PS2H110-030U | （X,Y）30 | （X,Y）1 | （X,Y）±1 | 3400 |
10 |
110×110×25 |
PS2L Displacement magnification mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS2L50-050U | （X,Y）50 |
（X,Y）2 |
（X,Y）±2 | 420 | 5 | 50×50×25 |
| PS2L92-050U | （X,Y）50 |
（X,Y）2 |
（X,Y）±2 | 1300 | 10 | 92×92×25 |
| PS2L100-080U | （X,Y）80 |
（X,Y）2 |
（X,Y）±2 | 480 | 10 | 100×100×30 |
| PS2L50-100U | （X,Y）100 |
（X,Y）2 |
（X,Y）±2 | 280 | 5 | 50×50×25 |
| PS2L60-250U | （X,Y）250 |
（X,Y）10 |
（X,Y）±10 | 120 | 5 | 60×60×26 |
PSVH / PSVL
Standard linear Z-axis stage
PSVH Direct-drive mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PSVH35-006U | 6 | 1 | ±1 | 3500 | 10 | 35×35×26 |
| PSVH45-012U | 12 | 1 | ±1 | 2600 | 10 | 45×45×36 |
| PSVH60F-012U | 12 | 1 | ±1 | 1600 | 50 | 60×60×40 |
| PSVH80F-030U | 30 | 1 | ±1 | 1200 | 50 | 80×80×60 |
PSVL Displacement magnification mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PSVL45-060U | 60 | 2 | ±2 | 570 | 5 | 45×45×32 |
| PSVL45F-100U | 100 | 2 | ±2 | 300 | 10 | 45×45×32 |
| PSVL60-100U | 100 | 2 | ±2 | 380 | 5 | 60×60×32 |
| PSVL60F-100U | 100 | 2 | ±2 | 270 | 10 | 60×60×38 |
| PSVL60F-150U | 150 | 5 | ±5 | 190 | 10 | 60×60×32 |
| PSVL80F-300U | 300 | 10 | ±10 | 180 | 10 | 80×80×38 |
PS3H / PS3L
Standard linear XYZ-axes stage
PS3H Direct-drive mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS3H70-020UA | （X,Y）20,（Z）12 | （X,Y,Z）1 | （X,Y,Z）±1 | 970 | 10 | 80×70×65 |
| PS3H120-030U |
（X,Y,Z）30 |
（X,Y,Z）1 | （X,Y,Z）±1 | 740 | 10 | 120×120×30 |
PS3L Displacement magnification mechanism
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS3L100-080UA | （X,Y）80,（Z）20 |
（X,Y）2,（Z）1 |
（X,Y）±2,（Z）±1 | 400 | 10 | 100×100×30 |
| PS3L68-100U | （X,Y,Z）100 | （X,Y,Z）2 | （X,Y,Z）±2 | 250 | 5 | 68×68×40 |