Линейные платформы с отверстием

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Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.

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Характеристики

Производитель

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THK PRECISION CO., LTD

Описание
Технические характеристики

Available from a compact to large openings
The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.

Smooth and accurate scanning
Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.

Applications

SPM,AFM
Microscope tables
Spectroscopic instruments
Semiconductor & FPD-related inspections
Photolithography systems, Exposure devices
Mapping measurements

Lineup

PK1L
X-axis stage with an opening

PK1L

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PK1L40-020U-N	-	-	-	6600	5	40×70×10
PK1L60-030U	30	1	±1	2800	10	60×70×16
PK1L45-100U	100	2	±2	490	5	45×55×16

PK2H / PK2L
XY-axes stage with an opening

PK2H

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PK2H100-030U	（X,Y）30	（X,Y）1	（X,Y）±1	2500	50	100×100×25
PK2H130-030U	（X,Y）30	（X,Y）1	（X,Y）±1	1500	50	130×130×30
PK2H150-050U	（X,Y）50	（X,Y）2	（X,Y）±2	1200	50	150×150×30

PK2L

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PK2L60-020U-N	-	-	-	1700	10	60×60×10
PK2L100-080U	（X,Y）80	（X,Y）2	（X,Y）±2	530	10	100×100×30
PK2L64-100U	（X,Y）100	（X,Y）2	（X,Y）±2	300	10	64×64×30
PK2L76F-100U	（X,Y）100	（X,Y）2	（X,Y）±2	240	10	76×76×32
PK2L130-100U	（X,Y）100	（X,Y）2	（X,Y）±2	580	10	130×130×30
PK2L150-100U	（X,Y）100	（X,Y）2	（X,Y）±2	420	10	150×150×30
PK2L150-200U	（X,Y）200	（X,Y）5	（X,Y）±5	370	10	150×150×30
PK2L150-300U	（X,Y）300	（X,Y）10	（X,Y）±10	240	10	150×150×30
PK2L280-200U	（X,Y）200	（X,Y）5	（X,Y）±5	150	20	280×280×28

PKVH / PKVL
Z-axis stage with an opening

PKVH

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PKVH60-012U	12	1	±1	2500	10	60×60×36

PKVL

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PKVL64F-100U	100	2	±2	480	10	64×64×30
PKVL100-100U	100	2	±2	480	10	100×100×30
PKVL84F-300U	300	10	±10	210	10	84×84×30
PKVL60-100U	100	2	±2	380	5	74×60×22
PKVL60-200U	200	5	±5	350	5	74×60×22
PKMVL160-200U	200	5	±5	150	10	160×240×24

PK3H / PK3L
XYZ-axes stage with an opening

PK3H

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PK3H130-030UA	（X,Y）30,（Z）20	（X,Y,Z）1	（X,Y,Z）±1	820	10	130×130×30
PK3H150-050UA	（X,Y）50,（Z）30	（X,Y）2,（Z）1	（X,Y）±2,（Z）±1	670	10	150×150×30

PK3L

Model Number	Travel range [μm]	Resolution [nm]	Repeatability [nm]	Resonant frequency [Hz]	Load capacity [N]	Size [mm]
PK3L150-100UA	（X,Y）100,（Z）30	（X,Y）2,（Z）1	（X,Y）±2,（Z）±1	430	10	150×150×30
PK3L150-100U	（X,Y,Z）100	（X,Y,Z）2	（X,Y,Z）±2	350	10	150×150×30
PK3L150-200UA	（X,Y）200,（Z）100	（X,Y）5,（Z）2	（X,Y）±5,（Z）±2	280	10	150×150×30
PK3L150-300UA	（X,Y）300,（Z）100	（X,Y）10,（Z）2	（X,Y）±10,（Z）±2	210	10	150×150×30

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