E series prober has excellent mechanical system, stable structure and performance, ergonomic design, more convenient operation, support multi-function upgrade, more abundant product functions. The product is mainly used in the manufacturing and research fields of integrated circuit,LED,LCD, solar cell and other industries.
Product Overview
E series prober has excellent mechanical system, stable structure and performance, ergonomic design, more convenient operation, support multi-function upgrade, more abundant product functions. The product is mainly used in the manufacturing and research fields of integrated circuit,LED,LCD, solar cell and other industries.Basic Information
Product number: E6Electricity demand: 220V,50~60Hz
Product Size: 640mm *700mm *730mm (L*W*H)
Working environment: Open type
Control method: Manual Probe Station
Equipment weight: About 80 kg
Application direction
LD/LED/PD Light intensity/wavelength test electrode /PAD test PCB/ package device Test material/device IV/CV characteristic test device high-frequency characteristic test (up to 300GHZ frequency) rf test, etc.Technical characteristics
POMater™ Adaptive shock absorbing base
The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.
The chuck can be adjusted lifting
The chuck can be adjusted lifting, the stroke is 5mm, and the accuracy is 10μm, which is convenient for the sample to quickly separate the probe.
Pneumatic fast lifting of microscope
The microscope is pneumatically quickly lifted, which is convenient to replace the microscope and the probe card holder.
Large size platform design
Large-size body structure enhances operating comfort. The micropositioner platform with larger space supports the loading of probe cards and improves the efficiency of probing test.
| E series | |||||
| Specification | |||||
| Model | E4 | E6 | E8 | E12 | |
| Dimension |
L:580mm* W:620mm* H:730mm |
L: 640mm* W: 700mm* H: 730mm |
L: 660mm* W: 660mm* H: 700mm |
L:1030mm* W:820mm* H:730mm |
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| Weight (about) | 70KG | 80KG | 85KG | 180KG | |
| Electricity Demand | 220VC, 50~60Hz | ||||
| Chuck | Size & Rotation angle | 4", 360° Rotation | 6", 360° Rotation | 8", 360° Rotation | 12", 360° Rotation |
| X-Y Travel Range | 4" * 4" | 6" * 6" | 8" * 8" | 12" * 12" | |
| Z Travel Range | 6mm (Fast switching) / 6mm (Fine-tune) | ||||
| Moving Resolution | 10μm | ||||
| Sample fixed mode | Vacuum adsorption | ||||
| Electrical design | Electrical Floating with Banana plug adapter, can be used as a backside electrode | ||||
| Platen | U Shape | 6 micropositioners available | 8 micropositioners available | 10 micropositioners avaible | 12 micropositioners available |
| Microscope | Moving range | X-Y : 2" * 2", Z : 50.8mm | |||
| Moving Resolution | 1μm | ||||
| Switching lens mode | Microscope Manually Tilting 30°by Lever | ||||
| Magnification | 16~100X/20~4000X | ||||
| Lens specification | Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 、100X（Option） | ||||
| CCD Pixel | 50W (Analog) / 200W (Digital) / 500W (Digital) | ||||
| Micropositioner | X-Y-Z Moving range | 12mm-12mm-12mm / 8mm-8mm-8mm | |||
| Mechanical resolution | 10μm / 2μm / 0.7μm / 0.1μm | ||||
| Current leakage accuracy |
Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C, Test conditions: dry environment with ground shielding (air dew point below -40°C) |
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| Cable connectors | Banana head / Crocodile clip / Coaxial / Triaxial | ||||
| Application | IC/LD/LED/PD test, PCB / Packaged device test, RF test etc. | ||||
| Optional Accessories | Microscope tilt mechanism (Tilting 30°Manually by Lever) | Gold-plated chuck | |||
| Microscope pneumatic lifting mechanism | Coaxial / Triaxial chuck | ||||
| Laser cutting and repairing | Chuck quick pull-out mechanism | ||||
| Probe clamp | Chuck rotation fine adjustment | ||||
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Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test interface accessory |
Light intensity / wavelength selection | ||||
| Liquid crystal leakage analysis package | RF Testing accessoriess | ||||
| High voltage and high current measurement package | Active probe | ||||
| Hot chuck | Low current / Capacitance test | ||||
| High/Low temprature chuck | intergration of intergral sphere | ||||
| Shielding box | Fixture for Fibre optic coupler test | ||||
| Special adapter | Fixture of PCB / Package test options | ||||
| Vibration free table | Special Custom design | ||||
| Characteristics | 1. Gantry design of the Microscope | ||||
| 2. The Microscope can be tilted or pneumatic lifted to change objective lens easily | |||||
| 3. Can be upgraded to do RF, high current testing and laser repair applications. | |||||
| 4. high moving accuracy | |||||
| Characteristics | |||||
| Compact design, affordable price | Driver Screws: Zero back lash | ||||
| Compatible with high magnification metallographic microscope, and can fine tune the movement | Available for 1um electrode / PAD probe | ||||
| University / Institute / Company laboratory use | LD/LED/PD Light intensity / wavelength testing | ||||
| Up to 12 inch wafer testing | IV/CV Characteristic testing of materials / devices | ||||
| Precision lead screw drive structure, linear movement |
High frequency characteristic test of devices (up to 300GHz) |
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