Платформы с тензометрическим датчиком
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
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Характеристики
Производитель
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THK PRECISION CO., LTD
Платформы с тензометрическим датчиком
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
Lineup
PS1L
X-axis stage
PS2L
XY-axes stage
PSVL
Z-axis stage
Objective lens focusing
Controller for the strain gauge type sensor
PS1L
X-axis stage
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS1L60-200U-S | 200 | 20 | ±20 | 470 | 5 | 60×60×26 |
| PS1L60-400U-S | 400 | 50 | ±50 | 290 | 5 | 60×60×26 |
PS2L
XY-axes stage
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS2L80-200U-S | （X,Y）200 | （X,Y）20 | （X,Y）±20 | 170 | 5 | 80×80×25 |
| PS2L90-400U-S | （X,Y）400 | （X,Y）50 | （X,Y）±50 | 155 | 5 | 90×90×25 |
PSVL
Z-axis stage
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PSVL60-200U-S | 200 | 20 | ±20 | 390 | 5 | 60×60×30 |
| PSVL60-400U-S | 400 | 50 | ±50 | 270 | 5 | 60×60×30 |
Objective lens focusing
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PFHW**-200U-S | 200 | 20 | ±20 | 380 | 60×74×24 |
| PFHW**-400U-S | 400 | 50 | ±50 | 250 | 60×74×24 |
| PFHC2020-800U-S | 800 | 100 | ±100 | 120 | 40×114×36 |
Controller for the strain gauge type sensor
| Model No | Number of axes for connection | Feedback control method |
Input interface |
Power supply |
Outside dimension [mm] |
|
|---|---|---|---|---|---|---|
|
|
|
Standard interface | Additional option | |||
| NCS6101S | 1Axis | PI analog | Analog voltage 0～10V | Serial（RS232C）or parallel（16bit） | AC100～120V / AC200～240V Switchable way | W87.5×D365×H135.8 |
| NCM6201S | 2Axis | PI analog | Analog voltage 0～10V | Serial（RS232C） | AC100～120V / AC200～240V Switchable way | W236×D388×H140 |
| NCM6301S | 3Axis | PI analog | Analog voltage 0～10V | Serial（RS232C） | AC100～120V / AC200～240V Switchable way |
W236×D388×H140 |