A Basics type based on the university education and laboratory test wafer prober, this equipment is mainly applied in the semiconductor industry, as well as test of the photoelectric industry, including research and development of precision electrical measurement of complex high-speed device, the chip and LD/LED/PD tests, PCB/packaging device testing, rf testing 50 microns electrode/PAD test materials/components/CV IV characteristic test, etc.
Product Overview
A Basics type based on the university education and laboratory test wafer prober, this equipment is mainly applied in the semiconductor industry, as well as test of the photoelectric industry, including research and development of precision electrical measurement of complex high-speed device, the chip and LD/LED/PD tests, PCB/packaging device testing, rf testing 50 microns electrode/PAD test materials/components/CV IV characteristic test, etc.Basic Information
Product number: M4/M6/M6 miniElectricity demand: 220V,50~60Hz
Product Size: 400mm *400mm *550mm （L*W*H）
Working environment: Open type
Control method: Manual probe station
Equipment weight: About 30 kg
Application direction
This equipment is mainly used for testing in semiconductor and optoelectronic industries, including r&d chip and LD/LED/PD test of complex high-speed devices,PCB/ package device test, AND IV/CV characteristic test of electrode /PAD test material/device over 50 microns.
Technical characteristics
> New upgraded chuck mobile platform
Enclosed mobile platform design, dustproof, error-proof operation, beautiful structure. The moving platform adopts THK precision lead screw drive + linear movement + no clearance return trip difference design + chuck locking function to improve chuck moving precision in many aspects.
> Chuck with 3-stage vacuum adsorption control
The central vacuum adsorption hole and 3-ring vacuum adsorption ring are used to fix the sample. Each vacuum channel of the chuck can independently control the central adsorption hole of the standard chuck to be 1mm in diameter. The chuck Angle can be rotated 360 and the precision of micro-rotation can be adjusted to 0.002 according to the requirements of customers, which is convenient to adjust the position of the sample to be tested.
> POMater™ Adaptive shock absorbing base
The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test
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Specification |
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| Model | M-4 | M-6 mini | M-6 | |
| Dimension |
L : 400mm* W : 400mm* H : 550mm |
L:400mm* W:400mm* H:550mm |
L : 680mm* W : 530mm* H : 550mm |
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| Weight (about) | 30KG | 35KG | 45KG | |
| Electricity Demand | 220VC, 50~60Hz | |||
| Chuck | Size & Rotation angle | 4", 360° Rotation | 6", 360° Rotation | 6", 360° Rotation |
| X-Y Moving range | 4" * 4" | 4" * 4" | 6" * 6" | |
| Moving resolution | 10μm | |||
| Sample fixed mode | Vacuum adsorption | |||
| Electrical design | Electrical Floating with Banana plug adapter, can be used as a backside electrode | |||
| Platen | U Shape | 6 Micropositioners available | 8 Micropositioners available | |
| Microscope | Moving range | 360° Rotation， Z : 50.8 mm | ||
| Magnification | 16~100X (200X as a option) | |||
| CCD Pixel | 50W (Analog) / 200W (Digital) / 500W (Digital) | |||
| Micropositioner | X-Y-Z Moving range | 12mm-12mm-12mm | ||
| Mechanical resolution | 10μm / 2μm / 0.7μm | |||
| Current leakage accuracy |
Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C, Test conditions: dry environment with ground shielding (air dew point below -40°C) |
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| Cable connectors | Banana head / Crocodile clip / Coaxial / Triaxial | |||
| Optional Accessories | Hot chuck | Light intensity / wavelength testing | ||
| Shielding box | RF Testing accessoriess | |||
| Special Adapter | Active probe | |||
| Vibration Free Table | Low current / Capacitance test | |||
| Gold-plated chuck | Intergration of intergral sphere | |||
| Coaxial / Triaxial chuck | Fixture for Fiber optic coupler test | |||
| Chuck quick Up/Down and fine | Fixture of PCB / IC test | |||
| adjustment option | ||||
| Chuck rotation fine adjustment | Special Custom design | |||
| Application | For IC/LD/LED/PD test，PCB / Packaged device test ,RF Test etc. | |||
| Characteristics | ||||
| Compact design | procision lead screw drive structure, linear movement | |||
| Light weight | Driver Screws: Zero back lash | |||
| Affordable price | Available for 50um electrode / PAD probe | |||
| Popular in University and Research laboratory | LD/LED/PD Light intensity / wavelength testing | |||
| Up to 6 inch wafer test | IV/CV Characteristic testing of materials / devices | |||