C series prober has excellent mechanical system, stable structure and performance, ergonomic design, easy operation, support multi-function upgrade, rich and comprehensive functions. This product is mainly used in the manufacturing and research fields of integrated circuit,LED,LCD, solar cell and semiconductor industry.
Product Overview
C series prober has excellent mechanical system, stable structure and performance, ergonomic design, easy operation, support multi-function upgrade, rich and comprehensive functions. This product is mainly used in the manufacturing and research fields of integrated circuit,LED,LCD, solar cell and semiconductor industry.
Product number: C6/C8/C12
Electricity demand: 220VC,50~60Hz
Product Size: 1400 mm * 920 mm * 920 mm (L*W*H)
Working environment: High and low temperature environment
Control method: Manual
Equipment weight: 150KG/170KG/250KG
Application direction
LD/LED/PD test,PCB/ package device test, MATERIAL/device IV/CV characteristic test, internal circuit/electrode /PAD test, hf RF test, etc.r
Technical characteristics
Technical characteristics
Pneumatic type mobile platform has the function of fast moving chuck, can meet the needs of efficient manual test by the corresponding gas float switch, provides three kinds of method of fast moving；Three - stage lifting needle base platform，the needle seat platform can rise and fall rapidly (0,300um,3mm)+ fine adjustment (40mm, moving resolution 2~5μm)；built-in 3 zoom multi-view, triple-rate concentric focal path system (internal optical zoom: 0.6:1；2.5:1；9:1);shielding cavity structure design，provides the best low noise and low leakage current capacity.At the same time, it keeps the sample under nitrogen or positive pressure environment at low temperature without frosting, and the unique cavity blowing structure prevents cryogenic frosting.
| C series | ||||
| Specification | ||||
| Model | C6 | C8 | C12 | |
| Dimension |
L: 860mm* W: 850mm* H: 700mm |
L: 880mm* W: 860mm* H: 750mm |
L: 1400mm* W: 920mm* H: 920mm |
|
| Weight (about) | 150KG | 170KG | 250KG | |
| Electricity Demand | 220VC, 50~60Hz | |||
| Chuck | Size & Rotation angle | 6", 360° Rotation | 8", 360° Rotation | 12", 360° Rotation |
| X-Y Moving range | 6" * 6" | 8" * 8" | 12" * 12" | |
| Moving resolution | 1μm | |||
| Sample exchange | Chuck quick move out mechanism for sample change | |||
| Sample fixed mode | Vacuum adsorption | |||
| Electrical design | Chuck Surface is Electrical Floating with Banana plug adapter, can be used as a backside electrode | |||
| Platen | O shape platen | 8 micropositioners available | 10 micropositioners available | 12 micropositioners available |
| Move range & adjustment | Platen can be quickly lifted up and down 6mm with automatic locking function | |||
| Platen can be fine tuned up and down 25mm precisely with 1μm resolution | ||||
| Temperature specification | Temperature range | - 100 ~ 300℃ | - 80 ~ 300℃ | - 60 ~ 300℃ |
| Temperature precision | 0.01°C resolution | |||
| heating method | Low voltage DC(LVDC) | |||
| Minimum temperature control rate | ± 0.1°C / hour | |||
| Refrigerant | Liquid nitrogen or Refrigeration compressor | |||
| Microscope | Moving range | X-Y axis : 2" * 2", Z axis : 50.8mm | ||
| Switching lens mode | Microscope tilting 30°manually by Lever | |||
| Magnification | 16~100X / 20~4000X | |||
| Lens specification | Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 、100X（Option） | |||
| CCD pixels | 50W (Analog) / 200W (Digital) / 500W (Digital) | |||
| Micropositioner | X-Y-Z Travel range | 12mm-12mm-12mm / 8mm-8mm-8mm | ||
| Mechanical resolution | 10μm / 2μm / 0.7μm / 0.1μm | |||
| Current leakage accuracy |
Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C, Test conditions: dry environment with ground shielding (air dew point below -40°C) |
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| Cable connectors | Banana head / Crocodile clip / Coaxial / Triaxial / SMA / K | |||
| Application | IC/ LD / LED / PD test, PCB /Packaged IC test , RF test under High and low temperature | |||
| Optional Accessories | Probe clamp | |||
| Dark field of microscope / DIC / Normarski Testing light intensity / wavelength testing | ||||
| RF Testing | ||||
| High voltage and high current test | ||||
| Shielding box | ||||
| Special adapter | ||||
| Vibration free table | ||||
| Gold-plated chuck | ||||
| Coaxial / Triaxial chuck | ||||
| Light intensity / Spectrum / Wavelength test | ||||
| Active probe | ||||
| Low current / Capacitance test | ||||
| Intergartion of intergral sphere | ||||
| Fixture of Packaged IC test | ||||
| Fixture of PCB test | ||||
| Special Custom design | ||||
| Characteristics | ||||
| Low temperature test in non-vacuum environment | Comfortable large handle, Driver Screws: Zero back lash | |||
| Compatible with high magnification metallographic microscope | 0.2 um or above internal circuit / electrode / PAD probe | |||
| Suitable in University and Research laboratory | LD/LED/PD Light intensity / wavelength testing | |||
| Up to 12 inch wafer testing | IV/CV Characteristic testing of materials / devices | |||
| High precision lead screw drive structure, linear movement | High frequency characteristic test of devices (up to 300GHz ) | |||