Линейные платформы с отверстием
Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.
Характеристики
Производитель
—
THK PRECISION CO., LTD
Линейные платформы с отверстием
Available from a compact to large openings
The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.
Smooth and accurate scanning
Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.
Applications
The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.
Smooth and accurate scanning
Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.
Applications
- SPM,AFM
- Microscope tables
- Spectroscopic instruments
- Semiconductor & FPD-related inspections
- Photolithography systems, Exposure devices
- Mapping measurements
Lineup
PK1L
X-axis stage with an opening
PK2H / PK2L
XY-axes stage with an opening
PKVH / PKVL
Z-axis stage with an opening
PK3H / PK3L
XYZ-axes stage with an opening
PK1L
X-axis stage with an opening
PK1L
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PK1L40-020U-N | - | - | - | 6600 | 5 | 40×70×10 |
| PK1L60-030U | 30 | 1 | ±1 | 2800 | 10 | 60×70×16 |
| PK1L45-100U | 100 | 2 | ±2 | 490 | 5 | 45×55×16 |
PK2H / PK2L
XY-axes stage with an opening
PK2H
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PK2H100-030U | （X,Y）30 |
（X,Y）1 |
（X,Y）±1 |
2500 | 50 | 100×100×25 |
| PK2H130-030U | （X,Y）30 | （X,Y）1 | （X,Y）±1 | 1500 | 50 | 130×130×30 |
| PK2H150-050U | （X,Y）50 | （X,Y）2 | （X,Y）±2 | 1200 | 50 | 150×150×30 |
PK2L
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PK2L60-020U-N |
- |
- |
- |
1700 | 10 | 60×60×10 |
| PK2L100-080U | （X,Y）80 | （X,Y）2 | （X,Y）±2 | 530 | 10 | 100×100×30 |
| PK2L64-100U | （X,Y）100 | （X,Y）2 | （X,Y）±2 | 300 | 10 | 64×64×30 |
| PK2L76F-100U | （X,Y）100 | （X,Y）2 | （X,Y）±2 | 240 | 10 | 76×76×32 |
| PK2L130-100U | （X,Y）100 | （X,Y）2 | （X,Y）±2 | 580 | 10 | 130×130×30 |
| PK2L150-100U | （X,Y）100 | （X,Y）2 | （X,Y）±2 | 420 | 10 | 150×150×30 |
| PK2L150-200U | （X,Y）200 | （X,Y）5 | （X,Y）±5 | 370 | 10 | 150×150×30 |
| PK2L150-300U | （X,Y）300 | （X,Y）10 | （X,Y）±10 | 240 | 10 | 150×150×30 |
| PK2L280-200U | （X,Y）200 | （X,Y）5 | （X,Y）±5 | 150 | 20 | 280×280×28 |
PKVH / PKVL
Z-axis stage with an opening
PKVH
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PKVH60-012U | 12 | 1 | ±1 | 2500 | 10 | 60×60×36 |
PKVL
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PKVL64F-100U | 100 | 2 | ±2 | 480 | 10 | 64×64×30 |
| PKVL100-100U | 100 | 2 | ±2 | 480 | 10 | 100×100×30 |
| PKVL84F-300U | 300 | 10 | ±10 | 210 | 10 | 84×84×30 |
| PKVL60-100U | 100 | 2 | ±2 | 380 | 5 | 74×60×22 |
| PKVL60-200U | 200 | 5 | ±5 | 350 | 5 | 74×60×22 |
| PKMVL160-200U | 200 | 5 | ±5 | 150 | 10 | 160×240×24 |
PK3H / PK3L
XYZ-axes stage with an opening
PK3H
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PK3H130-030UA | （X,Y）30,（Z）20 | （X,Y,Z）1 | （X,Y,Z）±1 | 820 | 10 | 130×130×30 |
| PK3H150-050UA | （X,Y）50,（Z）30 | （X,Y）2,（Z）1 | （X,Y）±2,（Z）±1 | 670 | 10 | 150×150×30 |
PK3L
| Model Number |
Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PK3L150-100UA | （X,Y）100,（Z）30 | （X,Y）2,（Z）1 | （X,Y）±2,（Z）±1 | 430 | 10 | 150×150×30 |
| PK3L150-100U | （X,Y,Z）100 | （X,Y,Z）2 | （X,Y,Z）±2 | 350 | 10 | 150×150×30 |
| PK3L150-200UA | （X,Y）200,（Z）100 | （X,Y）5,（Z）2 | （X,Y）±5,（Z）±2 | 280 | 10 | 150×150×30 |
| PK3L150-300UA | （X,Y）300,（Z）100 | （X,Y）10,（Z）2 | （X,Y）±10,（Z）±2 | 210 | 10 | 150×150×30 |