Универсальные зондовые станции MPI

FEATURES AND BENEFITS

Dedicated for silicon photonics on-wafer test
• Including various options of high-precision fiber alignment systems for ultra-fast scanning routines
• Multiple measurement capabilities for O-O, O-E, E-O and E-E de vice configuration
• Integrated Z-sensing for detecting the fiber to wafer contact point
• Crash protection when using two optical fiber arms
• Temperature capability from -40 °C to 200 °C
• Optional dark box for testing in light tight environment
System compatibility
• 200 mm: TS2000-IFE and TS2000-SE
• 300 mm: TS3000, TS3000-SE, TS3500 and TS3500-SE

INTEGRATED RACK FOR OPTICAL ALIGNMENT ELECTRONICS
The SiPH optical alignment system requires appropriate electronic components. To avoid consuming additional
floor space, an extra electronic rack has been integrated inside the probe systems foot print. It is located right above the optional chiller for the thermal chuck system and consists all the drivers for positioning, distance control
and optical detection.
The photonics alignment system is designed for single fiber and and multichannel arrays. Its modular design
allows the use of up to 6-axis fiber positioning stages.

SOFTWARE
Necessary optical alignment stages, such as the hexapod, are fully integrated into the SENTIO® probe station
control software. Those are operated just like any other automated positioner including its additional alignment
features. And not only integrated in the multi touch software, even the hardware control panel supports the SiPH
positioner type.
For easy test executive integration of the SiPH functionality MPI is providing free sample scripts. Those are coveringall necessary operation required for automated testing. Additionally, optical measurement equipment,
can be embedded to trigger the actual measurement such as IL or PDL measurements.